Thermodynamical Stability and Deposition of High-entropy MoNbTaTiZr Coating from a Composite Target
نویسندگان
1 National Research Nuclear University MEPhI, Moscow, Russia
2 Joint Institute for Nuclear Research, Dubna, Russia
3 National Research Nuclear University MEPhI, Moscow, Russia
4 Korkyt Ata Kyzylorda University, Ayteke bi St. No. 29A, Kyzylorda, Republic of Kazakhstan
5 Joint Institute for Nuclear Research, Dubna, Russia
6 Institute of Nuclear Physics, Ministry of Energy of the Republic of Kazakhstan, Almaty 050032, Kazakhstan
7 National Research Nuclear University MEPhI, Moscow, Russia
8 National Research Nuclear University MEPhI, Moscow, Russia
9 Department of Physics and Technology, Al-Farabi Kazakh National University, Almaty 050040, Kazakhstan
10 Korkyt Ata Kyzylorda University, Ayteke bi St. No. 29A, Kyzylorda, Republic of Kazakhstan
11 Joint Institute for Nuclear Research, Dubna, Russia
doi
10.48309/chemm.2026.563896.2059چکیده
Biocompatible high-entropy alloys (HEAs), such as the Mo-Nb-Ta-Ti-Zr system, are promising materials for medical implant applications. While the properties of bulk materials of these alloys have been extensively studied, their applications as coatings remain a prospective area of investigation. Achieving a specific stoichiometry, which is critical for these alloys, can be accomplished by magnetron sputtering method using a segmented target. In this study, the mixing entropy (∆Smix), mixing enthalpy (, atomic size difference , and valence electron concentration (VEC) were calculated to evaluate the alloy's stability. An empirical equation was employed to calculate the sputtering yields of Mo, Nb, Ta, Ti, and Zr. The theoretical results were compared with experimental data. Based on these findings, a segmented target was fabricated and utilized to deposit a MoNbTaTiZr high-entropy alloy coating.
