Low-Temperature Pulsed Laser Deposition for the Synthesis and Characterization of Nanopatterned Indium Tin Oxide on Glass Substrates for Gas Sensor Application
نویسندگان
1 Department of Basic Sciences, College of Dentistry, University of Babylon, Babylon, Iraq
2 Department of Basic Sciences, College of Dentistry, University of Babylon, Babylon, Iraq
3 Department of Basic Sciences, College of Dentistry, University of Babylon, Babylon, Iraq
doi
10.22052/JNS.2024.04.017چکیده
The results of this work exhibit the fabrication and characterization of nanopatterned ITO thin films on glass substrates through low temperature PLD for the purpose of gas sensing. The ITO films prepared at 25 ˚C displayed high transparency and conductivity, for their use in optoelectronics. X-ray diffraction (XRD) characterization disclosed a cubic form of In₂O₃ with particle size of about 33.64 nm while SnO₂ existed in a tetragonal form of about 14.57 nm. A mixed-phase sample of In₂O₃:SnO₂ exhibits well-defined peaks of both elements, proved the co-deposition process. The morphology of the nanoparticles was confirmed using FE-SEM, which revealed that the nanoparticles were spheroidal with a little aggregation and with an average size of 35-38 nm. Gas sensing evaluations revealed maximum sensitivity at a working temperature of 225°C, revealed by the changes in the resistance of ITO films exposed to 20 ppm ethanol vapor improving the carrier mobility of electrons. This optimized configuration and the low response time show that ITO thin films could potentially be used as ethanol gas sensors.
