Design and Simulation of a Clamped-Clamped Micromechanical Beam AM Frequency Mixer-Filter

نویسندگان
Gholipour, Atefeh ID 1
Mafinezhad, Khalil ID 2

1 Ph. D. Student,Department of Electrical Engineering, Ferdowsi university of Mashhad, Mashhad, Iran

2 Professor , Department of Electrical Engineering, Ferdowsi university of Mashhad, Mashhad

doi
چکیده

In the last decade Micromechanical components for communication applications has been fabricated via IC-compatible MEMS technologies. In fact, its most important impact is not at the component level, but rather at the system level, by offering alternative transceiver architectures that reduce power consumption and enhance performance. In this paper a mixer-filter ...

کلیدواژه‌ها
Micromechanical MEMS, resonator, quality factor, IC compatible fabrication, mechanical coupling, Clamped-Clamped beam