Simulation and Derivation of Deflection Equation for Suspended Diaphragm for MEMS Application Using Kirchhoff-Love Theory
نویسندگان
1 2Assistant Professor, Advanced Micro and Nano Devices Lab., Faculty of New Sciences& Technologies,
2 M.S student, Faculty of New Sciences& Technologies, University of Tehran, Tehran, Iran
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چکیده
In this paper, using theory of sheets, the deflection of suspended diaphragm has been obtained under uniform and circular loading. This type of diaphragm, unlike other diaphragms, has a central support which is recommended to be used in MEMS applications. The relationship between diaphragm deflection and static analysis of this diaphragm ...
