فهرست نشریات علمی دسترسی آزاد ایران

RF MEMS switches surpass traditional metal-to-metal switches by enabling the transmission of higher-power signals. A thin dielectric layer ensures the capacitive switch disconnects from the transmission line when in the off (down) state. This presentation highlights an innovative RF MEMS capacitive switch featuring a novel spring design. The switch provides key advantages, including high isolation, minimal losses, low operating (actuation) voltage, and reduced weight compared to similar devices. A unique spiral spring design enhances durability and minimizes actuation voltage to just 2.04 V. The switch’s transmission line maintains an impedance of approximately 50 Ω, utilizing gold for the transmission line and silicon dioxide for the dielectric layer. Simulations conducted with HFSS software confirm its superior RF performance. The results reveal excellent metrics: an S ­ 11 below -7.98 dB and an S ­ 21 above -1.76 dB at 51.3 GHz. In the off state, the switch achieves an impressive isolation of -41.13 dB at the same frequency. This novel design sets a new benchmark in RF MEMS switch performance.